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提出了一种基于微纳光栅泰伯效应的微光机电系统(MOEMS)加速度计，通过Comsol软件对加速度计结构和光栅结构参数进行优化，使其在20g量程范围内获得较大的结构灵敏度和衍射效应灵敏度，同时通过仿真分析了该结构的交叉轴串扰情况。由于受外界温度起伏影响，双层光栅结构间距受热膨胀系数的影响产生相对位移。为了减小由于温度起伏对光栅加速度计零偏的影响，采用温度闭环反馈控制技术将加速度计温度变化控制在±10 mK范围内。经实验测试，加速度计零偏稳定性达3.7μg,相较于无温控情况提升了近7倍。最终实现光栅MOEMS加速度计的灵敏度达5.23 V/g,线性相关系数为99.9%,分辨率达286.8μg。
Abstract：A micro-opto-electro-mechanical system(MOEMS) accelerometer based on Talbot effect of micro-nano grating was proposed. The accelerometer structure and grating structure parameters were optimized by Comsol software, which enables higher structural sensitivity and optical diffraction effect sensitivity in the range of 20g. At the same time, the cross-axis crosstalk of the structure was analyzed by simulation. Due to the effect of the external temperature fluctuations, the distance of the double-layer grating structure was affected by the thermal expansion coefficient, and the relative displacement occurs. To mitigate the impact of the temperature fluctuations on the bias stability of grating accelerometer, the temperature closed-loop feedback control technique was employed to control the temperature change of the accelerometer within ±10 mK. Experimental results indicate that the bias stability of the accelerometer can be reached to 3.7μg, which is nearly 7 times superior to the case of without temperature control. Finally, the sensitivity of grating MOEMS accelerometer is 5.23 V/g, the linear correlation coefficient is 99.9%, and the resolution is 286.8μg.
[1] LONG L,GUO Z H,ZHONG S L.A MEMS accelerometer based on wavelength modulation using an integrated blazed grating[J].IEEE Sensors Journal,2019,19(3):877-884.
[2] LU Q B,BAI J,WANG K W,et al.Design,optimization,and realization of a high performance MOEMS accelerometer from a double-device-layer SOI wafer[J].Journal of Microelectromechanical Systems,2017,26(4):859-869.
[3] LU Q B,WANG Y A,WANG X X,et al.Review of micromachined optical accelerometers:from mg to sub-μg[J].Opto-Electronic Advances,2021,4(3):200045.
[4] KEELER B E N,CARR D W,SULLIVAN J P,et al.Experimental demonstration of a laterally deformable optical nanoelectromechanical system grating transducer[J].Optics Letters,2004,29(11):1182-1184.
[5] ZHAO H B,LI M W,ZHANG R,et al.High-precision microdisplacement sensor based on zeroth-order diffraction using a single-layer optical grating[J].Applied Optics,2020,59(1):16-21.
[6] LI H,DENG K K,GAO S,et al.Design of closed-loop parameters with high dynamic performance for micro-grating accelerometer[J].IEEE Access,2019,7:151939-151947.
[7] LI H,LI S K,DENG K K,et al.Analysis and design of closed-loop detection technique for micro-grating accelerometer[J].Journal of Lightwave Technology,2018,36(24):5738-5745.
[8] ZHANG Y,GAO S,XIONG H,et al.Optical sensitivity enhancement in grating based micromechanical accelerometer by reducing non-parallelism error[J].Optics Express,2019,27(5):6565-6579.
[9] GAO S,ZHOU Z,ZHANG Y,et al.High-resolution micro-grating accelerometer based on a gram-scale proof mass[J].Optics Express,2019,27(23):34298-34311.
[10] MUSTAFAZADE A,PANDIT M,ZHAO C,et al.A vibrating beam MEMS accelerometer for gravity and seismic measurements[J].Scientific Reports,2020,10:10415.
[11] LI C,YANG B,ZHENG X,et al.■ optomechanical accelerometer employing a three-dimensional MEMS interferometer[J].Optics Letters,2022,47(7):1883-1886.
[12] TENG S Y,ZHANG N Y,DONG Q R,et al.Diffraction of a one-dimensional phase grating in the deep Fresnel field[J].Journal of the Optical Society of America:A,2007,24(11):3636-3643.
[13] ZHANG Y,WEN J M,ZHU S N,et al.Nonlinear Talbot effect[J].Physical Review Letters,2010,104(8):183901.
[14] SOLAK H H,DAIS C,CLUBE F.Displacement Talbot lithography:a new method for high-resolution patterning of large areas[J].Optics Express,2011,19(11):10686-10691.
[15] CASE W B,TOMANDL M,DEACHAPUNYA S,et al.Realization of optical carpets in the Talbot and Talbot-Lau configurations[J].Optics Express,2009,17(23):20966-20974.
[16] 靳黎明，王策，金丽，等.基于纳米光栅泰伯效应的三轴加速度计仿真设计[J].传感器与微系统，2022,41(5):76-79.JIN L M,WANG C,JIN L,et al.Simulation design of tri-axial accelerometer based on Talbot effect of nano-grating[J].Transducer and Microsystem Technologies,2022,41(5):76-79.
[17] XIE K Y,ZHANG R,XIN C G,et al.Micro-opto-electro-mechanical gyroscope based on the Talbot effect of a single-layer near-field diffraction grating[J].Applied Optics,2021,60(13):3724-3731.
[18] 赵双双.微光学集成的高精度MOEMS加速度传感器研究[D].杭州：浙江大学，2013.ZHAO S S.Research on high-resolution MOEMS accele-rometers based on integrated optics[D].Hangzhou:Zhejiang University,2013.
[19] JIN L M,WANG C,JIN L,et al.Micro-opto-electro-mechanical systems accelerometer based on the Talbot effect of double-layer diffraction gratings[J].Applied Optics,2022,61(18):5386-5391.
基本信息:
DOI：10.13250/j.cnki.wndz.24040403
中图分类号:TH824.4
引用信息:
[1]王策,张晓玉,金丽等.微纳光栅MOEMS加速度计优化设计与测试[J].微纳电子技术,2024,61(04):120-126.DOI:10.13250/j.cnki.wndz.24040403.
基金信息:
国家自然科学基金(62005253)