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回顾了MEMS微陀螺仪的研究进展,简单介绍了MEMS微陀螺仪的市场应用。微陀螺仪是MEMS器件中非常重要的一类器件。它的运用已经从单纯的航空领域逐渐转向汽车、消费电子行业等低端市场,这意味着微陀螺仪除了传统意义上的高精度高稳定性的要求,也可以向低精度商品化发展。传统的振动式陀螺,由于原理的局限性和加工技术的限制,很难达到战术级和惯性级的要求。导航级集成微陀螺(NGIMG)项目建议使用其他途径,以减少器件的可移动部件和降低工艺难度,从而提高其精度和抗干扰能力。各种设计方法近年来层出不穷,其中悬浮转子式微陀螺是目前精度最高的陀螺仪,微集成光学式陀螺也将在未来一段时间拥有巨大的研究潜力和发展空间。
Abstract：The research progress of MEMS micro-gyroscopes are reviewed.The market applications of MEMS micro-gyroscopes are introduced briefly.Micro gyroscopes play a significant role in the MEMS devices.From aviation fields,its application has gradually shifted to the low-end market,such as automobile and consumer electronics,which means that instead of the high precision and stability,commercialization is another development direction.As the limitation of the principle and the fabrication technology,the traditional vibrating gyroscopes can hardly reach the tactical grade and the inertial grade.The NGIMG program,supported by DARPA,suggests to use other methods to reduce flexible components,decrease the processing difficulty and improve the precision and antijamming capability.In the recent years,endless varieties of designs are proposed.The micro levitated rotational gyroscope is the most precise gyroscope in the world now,and the MEOMS gyroscope also has a great research potential and development in the future.
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基本信息:
DOI：
中图分类号:V241.5
引用信息:
[1]成宇翔,张卫平,陈文元等.MEMS微陀螺仪研究进展[J].微纳电子技术,2011,48(05):277-285.
基金信息:
上海交通大学SMC优秀青年学者计划(T241460622);; 上海人才发展基金(047)