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基于硅MEMS腔体技术的微波带通滤波器是微波通信系统中的关键器件。开发了一种利用硅MEMS腔体技术制作的微波带通滤波器。采用梳状结构四分之一波长谐振器级联形成微波带通滤波器,利用全波三维电磁场仿真设计软件进行了设计、建模、仿真和优化,并使用微机械加工(MEMS)工艺技术在高阻硅衬底上加工,形成滤波器。仿真和实测结果表明,硅MEMS腔体带通滤波器的尺寸仅为8 mm×4 mm×0.8 mm,质量不足0.1 g,并且所得仿真和实测性能结果一致性较好。与传统的金属矩形/圆形波导滤波器以及LC滤波器相比,硅MEMS腔体带通滤波器的体积和质量是前者的几百分之一。此外硅MEMS腔体带通滤波器还具有高抑制度、一致性好及易于集成等优点。
Abstract：Microwave band-pass filters based on the silicon MEMS cavity technology are the key devices in microwave communication systems.A kind of microwave band-pass filter was developed with the silicon MEMS cavity technology.The microwave band-pass filter consisting of the cascaded resonators with the 1/4 wave length comb structure was designed,modeled,simulated and optimized by the full-wave 3D electromagnetic field simulation and design software.The filter was realized by the MEMS technology on the high resistivity silicon substrate.The simulated and measured results show that the size of the microwave band-pass filter based on the silicon MEMS cavity is only 8 mm×4 mm×0.8 mm,the mass is less than0.1 g,and the performance results of the simulation and actual tests have good consistency.Compared with the traditional microwave filters utilizing metallic rectangular/circular waveguides or LC components,the size and mass of the band-pass filters based on the silicon MEMS cavity technology are a part in several hundreds of those of the formers.Besides,the band-pass filters based on the silicon MEMS cavity technology have many advantages such as high suppression degree,excellent consistency and easy integration,etc.
[1]MILAD S S,ALI K,PER S K.Direct-coupled cavity filter in ridge gap waveguide[J].IEEE Transactions on Components,Packaging and Manufacturing Technology,2004,4(3):490-495.
[2]STEPHEN B,JERRY F,STEPHEN H,et al.A Ka-band dual mode dielectric resonator loaded cavity filter for satellite applications[J].IEEE Microwave and Wireless Components Letters,2012,14(1):8-12.
[3]HAI H T,ANH-VU P.Compact wide stopband bandpass filter on multilayer organic substrate[J].IEEE Microwave and Wireless Components Letters,2014,15(1):161-163.
[4]AMIR E,WITHAWAT W,SAID F,et al.Compact dualmode wideband filter based on complementary split-ring resonator[J].IEEE Microwave and Wireless Components Letters,2014,24(3):152-154.
[5]CHANG Y Z,LEE W S,WU H I,et al.Miniaturizing the size of microwave filter by using LTCC technology with hybrid dielectrics[J].Microwave Conference Proceedings,2005,35(1):1-4.
[6]LIU G H,KANG C M.Developing status and trend of MEMS technology[J].Journal of Transducer Technology,2001,20(1):52-56.
[7]MATTHIEU C,ARNAUD P,CYRIL G,et al.High-Q3D tunable RF MEMS filter with a constant fractional bandwidth[C]//Proceedings of the 8th European Microwave Integrated Circuits Conference.New York,USA,2008:312-315.
[8]梁昌洪,谢拥军,官伯然.简明微波[M].西安:高等教育出版社,2006:133-135.
[9]马冲,冯少阳,杨小雪.微波滤波器耦合系数的仿真与优化[C]//全国微波毫米波会议.青岛,中国,2011:430-433.
[10]甘本祓,吴万春.现代微波滤波器的结构与设计(上、下册)[M].北京:科学出版社,1973:50-70.
基本信息:
DOI：10.13250/j.cnki.wndz.2015.05.006
中图分类号:TN713.5
引用信息:
[1]陈熙,李丰,马文涛等.基于硅MEMS腔体技术的微波带通滤波器[J].微纳电子技术,2015,52(05):299-303.DOI:10.13250/j.cnki.wndz.2015.05.006.
基金信息: