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随着柔性传感器的发展，传统加工工艺难以满足其高精度生产要求。电喷印作为一种新兴的微纳加工工艺，在复杂图案加工和高精度加工方面具备明显优势。研发了一种具备反馈功能的电喷印软件控制系统，实现了图案解析和机器视觉的在线监测。首先研究了不同形式打印目标的复杂图案解析方法，进行了响应曲面法设计实验，设计了对应的实时在线视觉监测算法和复杂图案的打印路径的优化算法，建立了电喷印关键工作参数的预测数学模型，并进行了测试分析。结果表明：该控制系统实现了打印过程的自动反馈，显著缩短了工作时间，使得电喷印过程的泰勒锥可准确地按需控制，打印线段相对偏差的统计值由±11%左右，减小至±6%左右，并打印出了最小半径为103μm的液滴和最小线宽为151μm的线段。研究成果为柔性微纳制造工艺提供了更高效、精确的生产方法。
Abstract：With the development of flexible sensors, traditional machining techniques are unable to meet the high-precision production requirements. As an emerging micro-and nano-fabrication technique, electrohydrodynamic inkjet printing demonstrates significant advantages in complex pattern fabrication and high-precision processing. A software control system with feedback capability for electrohydrodynamic inkjet printing was developed, enabling online monitoring of pattern recognition and machine vision.Firstly, different complex pattern recognition methods for various forms of printing targets were studied, response surface methodology experiments were conducted, corresponding real-time online visual monitoring algorithms and optimization algorithms for the printing paths of complex patterns were designed, and a predictive mathematical model for key working parameters of the electrohydrodynamic inkjet printing was established and tested. The research results indicate that based on the established mathematical model, the Taylor cone in the electrohydrodynamic inkjet printing process can be accurately and selectively controlled through pattern analysis and machine vision online monitoring feedback, the working time is reduced significantly. The statistical relative error in the printed line segments reduces from about ±11% to around ±6%, achieving a minimum droplet radius of 103 μm and a minimum line width of 151 μm. The research achievement provides a more efficient and precise production method for flexible micro-nano manufacturing.
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基本信息:
DOI：10.13250/j.cnki.wndz.24030505
中图分类号:TP391.41;O361.4;TH122
引用信息:
[1]冯天成,张嘉容,王文国等.基于图案解析与视觉在线检测的电喷印控制方法[J].微纳电子技术,2024,61(03):166-174.DOI:10.13250/j.cnki.wndz.24030505.
基金信息:
国家自然科学基金面上项目(52175428); 辽宁省教育厅重点攻关项目(LJKZZ20220020); 辽宁省研究生教育教学改革研究项目(LNYJG2022067)