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针对当前6G无线通信系统对3 mm毫米波器件的需求急速增加，为了提前应对在这一频段的通信协议划分，利用金属谐振腔和矩形波导设计出一款中心频率为102.03 GHz的单频带通滤波器。然后，基于多模传输理论将其优化为一款中心频率分别为96.83和106.31 GHz的单通道双频带通腔体滤波器。采用交叉耦合的方式引入传输零点，设计出一款在98～105 GHz的工作范围内，具有98.49、99.79和104.20 GHz三个中心频率的超窄带三频带通腔体滤波器，其3 dB相对带宽分别为0.32%、0.63%和0.30%。采用基于SU-8负性光刻胶的UV-LIGA工艺对样品进行加工，并使用搭建的W波段电磁性能测试平台完成对样品射频性能的测试，测试结果与仿真结果具有良好的一致性。
Abstract：In view of the rapid increase in the demand for 3 mm millimeter-wave devices in the current 6G wireless communication system, and for dealing with the communication protocol division in the frequency band in advance, a single-band bandpass filter with a center frequency of 102.03 GHz was designed with metal resonator and rectangular waveguide. Then, based on the multimode transmission theory, it was optimized into a single-channel dual-band bandpass cavity filter with the center frequencies of 96.83 and 106.31 GHz, respectively. Finally, an ultra-narrowband triple-band bandpass cavity filter with three center frequencies of 98.49, 99.79 and 104.20 GHz in the working range of 98-105 GHz was designed by introducing transmission zeros through cross-coupling. The 3 dB relative bandwidths are 0.32%, 0.63% and 0.30%, respectively. The sample was fabricated by UV-LIGA process based on SU-8 negative photoresist, and the RF performance was tested by W-band electromagnetic performance test platform. The test results are in good agreement with the simulation results.
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基本信息:
DOI：10.13250/j.cnki.wndz.2023.07.011
中图分类号:TN713.5
引用信息:
[1]屈增,秦瑞杰,王佳云等.基于UV-LIGA工艺的超窄带毫米波三频带通滤波器[J].微纳电子技术,2023,60(07):1077-1085.DOI:10.13250/j.cnki.wndz.2023.07.011.
基金信息:
国家自然科学基金(52175555); 山西省基础研究计划青年项目(202203021212146); 山西重点研发项目(国际合作)获得山西省“1331工程”重点学科建设基金(20183D421043); 山西省创新社区基金(51821003)