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MEMS传感器种类繁多,发展迅猛,应用广泛。首先,简单介绍了MEMS传感器的分类和典型应用。其次,对MEMS压力传感器、加速度计和陀螺仪三种最典型的MEMS传感器进行了详细阐述,包括类别、技术现状和性能指标、最新研究进展、产品,及应用情况。介绍MEMS压力传感器时,给出了国内外采用新型材料制作用于极端环境下压力传感器的研究情况。最后,从新材料、加工和组装技术方面对MEMS传感器的发展趋势进行了展望。
Abstract：MEMS sensors feature great varieties,rapid development and wide applications.Firstly,the categories and typical applications of MEMS sensors are introduced briefly.Then three typical MEMS sensors,i.e.the pressure sensor,accelerometer and gyroscope are illustrated in detail,including the subdivision,current technical capability and performance index,latest research progress,products and their applications.Besides that,the research status of the MEMS pressure sensor using new materials for the extreme environment at home and abroad is presented.Finally,development trends of MEMS sensors are predicted in terms of new materials,proces-sing and assembling technology.
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基本信息:
DOI：
中图分类号:TP212
引用信息:
[1]王淑华.MEMS传感器现状及应用[J].微纳电子技术,2011,48(08):516-522.
基金信息: