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设计了一款含有一个非谐振节点的W波段矩形波导带通滤波器,实现了其传输函数中传输零点可任意放置的功能。滤波器包括一个T型结波导结构、两个TE101模谐振腔和四对电感膜片。其中T型结波导结构中连接了一个TE101模谐振腔,能够产生一个传输零点,通过调整该谐振腔的结构参数尺寸,能够独立地控制传输零点的位置。使用Ansoft HFSS软件对滤波器整体结构参数进行仿真和分析,将传输零点放置在通带的任意一侧,提高了滤波器的带外抑制。使用微电子机械系统(MEMS)工艺对传输零点在通带低频端的滤波器原型进行加工并测试,测试结果与仿真结果总体上吻合良好。
Abstract：A W-band rectangular waveguide passband filter with a non-resonating node was designed to realize the transfer function with arbitrarily placed transmission zero.The filter consists of a T-type junction waveguide,two TE101 mode resonant cavities and four pairs of inductive irises.A TE101 mode resonant cavity was connected to the T-type junction waveguide.And the resonant cavity can generate a transmission zero that can be controlled independently by adjusting the structure parameter dimensions of the resonant cavity.The whole structure parameters of the filter were simulated and analyzed by Ansoft HFSS software,and the transmission zero was placed on any side of the passband to improve the out of band suppression of the filter.The filter prototype with a transmission zero below the passband was fabricated by the micro-electromechanical system(MEMS)process and measured.The measured results as a whole are in good agreement with the simulation results.
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基本信息:
DOI：10.13250/j.cnki.wndz.2018.05.005
中图分类号:TN713.5
引用信息:
[1]肖红,陈婧,段俊萍等.W波段含非谐振节点的MEMS波导带通滤波器[J].微纳电子技术,2018,55(05):327-332.DOI:10.13250/j.cnki.wndz.2018.05.005.
基金信息:
国家自然科学基金资助项目(51475438,61401405);国家自然科学基金联合基金重点支持项目(U1637212);; 山西省自然科学基金资助项目(201401021-4);; 山西省回国留学人员科研资助项目(2014-005);; 山西省人社厅留学项目(20150603ZX)