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装备领域的变革对智能化提出了新的要求，模块化、通用化成为当前的重要趋势。基于微机电系统(MEMS)技术的惯性集成微系统因具备高密度多功能集成、高可靠等优点，可满足高效费比和精准作用需求。从智能装备对MEMS惯性集成微系统的需求出发，重点介绍了MEMS惯性集成微系统跨尺度设计、三维异构集成工艺、集成检测与可靠性验证等关键技术，并对技术发展趋势进行了分析。
Abstract：Changes in the field of equipment have put forward new demands for intelligence. Modularization and universalization have become important trends. Micro-electromechanical system(MEMS) inertial integrated microsystems, due to their advantages of high-density multifunction integration and high reliability, can meet requirements for high cost-effectiveness ratio and precise actions. Starting from the needs for intelligent equipment towards MEMS inertial integrated microsystems, key technologies on aspects of cross-scale design of MEMS inertial integrated microsystems, three-dimensional heterogeneous integration processes, integrated testing, and reliability verification are introduced, and the technology development trends are analyzed.
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基本信息:
DOI：10.13250/j.cnki.wndz.25030403
中图分类号:TH-39
引用信息:
[1]蒋鹏,鞠莉娜,王子等.面向智能装备的MEMS惯性集成微系统关键技术分析[J].微纳电子技术,2025,62(03):98-104.DOI:10.13250/j.cnki.wndz.25030403.
基金信息: