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近年来，硅基半导体技术尤其是互补金属-氧化物-半导体(CMOS)集成电路技术已逼近了物理和经济成本上的极限，半导体行业逐渐步入后摩尔时代。碳纳米管(CNT)是由高度石墨化的碳原子卷曲形成，具有高迁移率、高热导率及良好的力学性能等材料特性。上述特性使CNT在复合材料、能源存储、柔性传感器、集成电路等领域表现出良好的应用前景，是后摩尔时代新型半导体材料的热门候选之一。介绍了CNT的物理特性、结构和生长机理，着重分析CNT的不同制备路线、工艺优化及生长机理方面的研究进展。此外还讨论了CNT在复合材料、柔性传感器、能源存储和集成电路等领域的应用特点，对CNT制备技术的发展进行了总结和展望。
Abstract：In recent years, silicon-based semiconductor technology, especially complementary metal-oxide-semiconductor transistor(CMOS) integrated circuits, has been approaching its fundamental physical limits and rising economic constraints, thus, the semiconductor industry has gradually entered the post-Moore era. Carbon nanotubes(CNTs) are formed by rolling highly graphitized carbon sheets and have material properties, such as high carrier mobility, high thermal conductivity and excellent mechanical performance. These characteristics make CNTs promising in the fields, including composites, energy storage, flexible sensors and integrated circuits, and indicate their potential as novel semiconductor materials in the post-Moore era. The physical properties, structures and growth mechanisms of CNTs are introduced, and the research progresses of different fabrication routes, process optimization and the growth mechanisms of CNTs are emphatically analyzed. In addition, the application characteristics of CNTs in composite materials, flexible sensors, energy storage and integrated circuits are discussed, and the development of CNTs fabrication technologies is summarized and prospected.
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基本信息:
DOI：10.13250/j.cnki.wndz.26080101
中图分类号:TN386;TB383.1;TQ127.11
引用信息:
[1]张志峰,陈铖颖,张弘鹏.碳纳米管制备与应用的研究进展[J].微纳电子技术,2026,63(08):7-21.DOI:10.13250/j.cnki.wndz.26080101.
基金信息:
国家自然科学基金(6247011759); 厦门市自然科学基金(3502720227070); 厦门理工学院高层次人才科研项目(YKJ22049R)
2026-07-17
2026-07-17
2026-07-17