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以具有大的表面积及特殊的中空结构的碳纳米管(CNT)作为气敏传感器敏感层材料为基础,介绍了CNT在开发不同类型气敏传感器技术方面的最新进展。综述了CNT及以贵金属、金属氧化物、聚合物改性的CNT作为气敏传感器材料的研究现状,并以气敏传感器的灵敏度和响应速度为标准,对比了CNT与三种CNT复合材料作为气敏传感器敏感层的优缺点。总结了每种传感器的设计方法、制作工艺和传感机理,提出了CNT气敏传感器当前面临的技术挑战,并对以后CNT作为气敏传感器材料的发展进行展望。
Abstract：Based on the carbon nanotubes(CNTs)with large surface area and special hollow structure as sensitive layer materials of gas sensors,the latest progresses of CNTs in the technology development of different types of gas sensors are introduced.Then the research status of CNTs and CNTs modified by the precious metal,metal oxide and polymer as materials of gas sensors are summarized.Besides,the advantages and disadvantages of CNTs and three kinds of CNTs composite materials as sensitive layers of gas sensors are compared with the sensitivity and response speed of the gas sensor as the standard.The design method,fabrication process and sensing mechanism of each of these sensors are summarized.The current technical challenges of the CNTs gas sensors are proposed and the future development of CNTs as materials of gas sensors is prospected.
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基本信息:
DOI：10.13250/j.cnki.wndz.2018.04.003
中图分类号:TB383.1;TP212
引用信息:
[1]王佳玮,杨艳青,焦琛,等.碳纳米管在气敏传感器应用中的研究进展[J].微纳电子技术,2018,55(04):239-246+289.DOI:10.13250/j.cnki.wndz.2018.04.003.
基金信息:
中国博士后基金第59批面上基金资助项目(2016M592654);; 山西省基础研究计划资助项目(2015021062)
2018-03-20
2018-03-20
2018-03-20