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基于力学振动原理 ,导出敏感梁类谐振振动的微分方程 ,给出了振梁型加速度计的设计原理。指出了加速度计谐振梁频率的相对变化量与梁的厚度无关 ;为避免输出非线性频率信号 ,频率的相对变化率和激励振动的振幅都不宜太大
Abstract：Based on Mechanics of vibration, the quasi resonant differential equation of sense beam is derived, and the design principle is given for the vibrating beam type accelerometer. It is shown that the frequency change rate is independent of the width of the vibrating beam, and the frequency change rate and the deflected beam amplitude must be small in order to avoid non linear behaviour.
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[4] 倪振华.振动力学[J].西安交通大学出版社,1994,3569,367405.
基本信息:
DOI：10.13250/j.cnki.wndz.2003.z1.081
中图分类号:TH824.4
引用信息:
[1]贾玉斌,郝一龙,钟莹,张嵘.基于谐振原理的硅微机械加速度计[J].微纳电子技术,2003(Z1):271-273.DOI:10.13250/j.cnki.wndz.2003.z1.081.
2003-08-25
2003-08-25