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介绍了新思科技(Synopsys Inc.)最新推出的新一代nm级IC制程工艺设计工具——Sen-Taurus Process的基本功能及其仿真领域,详细阐述了SenTaurus Process功能的拓展。对SenTau-rus Process增加的模型库浏览器(PDB)、一维模拟结果输出(Inspect)及二、三维模拟结果输出(Tecplot SV)工具进行了介绍。重点介绍了SenTaurus Process所嵌入的诸多小尺寸模型。
Abstract：This paper introduces the elementary functions and emulational domains of the new generation nano-level IC process design tool:SenTaurus Process,which was recently issued by Synopsys Inc..It specifies the functional extensions of SenTaurus Process and presents Parameter Database Browser(PDB),1D simulated results deferent tools(Inspect)and 2D/3D simulated results deferent tools(Tecplot SV).It emphasizes a lot of small size models inserted in SenTaurus Process.
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基本信息:
中图分类号:TN405
引用信息:
[1]于英霞,李惠军,侯志刚,等.新一代nm级集成工艺仿真工具——SenTaurus Process[J].微纳电子技术,2007,No.360(05):231-234+245.