微纳电子技术

风速风向参数的测量在气象测量中占有重要的地位。基于MEMS技术的固态风速风向传感器具有体积小、重量轻、成本低的优点。设计了两种基于MEMS工艺的固态测风传感器,即硅薄膜式测风传感器和硅悬梁式测风传感器,用流体力学原理对这两种风速风向传感器进行了理论分析及ANSYS CFD软件模拟仿真,得出了风速与挠度、剪切力的关系。用惠斯通电桥测量传感器输出信号,通过单个传感器的二次封装测量风向信号。制作出了硅悬梁式测风传感器,并进行了初步测试。

The information of wind speed and direction is important in the measure ment of weather condition.MEMS-based solid state wind speed and direction sensor has advantages of small size,light weight and low cost.Two kinds of sensors were designed: silicon membrane wind speed and direction sensor,and silicon cantilever wind speed and direction sensor.The designed sensors were simulated and analyzed based on fluid mechanics principle in ANSYS CFD software.The figures of the relations between wind speed and deflection,wind speed and stress were obtained through the simulation.The output signal of the designed sensors were detected using Wheatstone bridge,and the information of wind direction was measured using single sensor secondary perpendicular encapsulation.