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| 下载次数 | 被引频次 | 阅读次数 |
通过水热法制备不同原子数分数铜(Cu)掺杂氧化锌(ZnO)纳米棒材料,并通过扫描电子显微镜(SEM)、X射线衍射仪(XRD)和X射线光电子能谱仪(XPS)对所制备样品的结构形貌及表面价态进行表征与测量。采用介电泳(DEP)操控技术将不同材料按照电场的分布均匀排列在叉指电极之间,制成电容式湿度传感器。测试数据表明与未掺杂ZnO样品相比,Cu掺杂ZnO样品尤其是原子数分数2%及5%Cu掺杂ZnO,具有更好的灵敏度等传感特性。Freundlich模型拟合结果表明,Cu掺杂能够有效提高材料的湿度吸附强度与容量。同时结合复阻抗频谱与多层吸附理论对传感机理进行深入讨论,结果表明适量Cu掺杂能够有效提高敏感材料中氧空位浓度,进而提供更多吸附位点,提高湿度传感特性。
Abstract：The zinc oxide(ZnO)nanorods doped with copper(Cu)of different atom fractions were prepared by the hydrothermal method,and the morphology and surface valence of the prepared samples were characterized and measured by scanning electron microscope(SEM),X-ray diffraction(XRD)and X-ray photoelectron spectroscopy(XPS).Dielectrophoresis(DEP)control technology was used to uniformly arrange different materials between the interdigital electrodes according to the electric field distribution,and the capacitive humidity sensor was prepared.The test data show that compared with the undoped ZnO sample,the Cu-doped ZnO samples have better sensitivity sensing characteristics,especially for the Cu-doped ZnO samples doped with Cu of 2%and 5%atom fractions.Freundlich model fitting results show that Cu doping can effectively improve the moisture adsorption strength and capacity of the materials.The sensing mechanism was discussed with the complex impedance spectrum and multilayer adsorption theory.The results show that the proper Cu doping can effectively improve the oxygen vacancy concentration in sensitive materials,then providing more adsorption sites and improving humidity sensing characteristics.
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基本信息:
DOI：10.13250/j.cnki.wndz.2019.05.006
中图分类号:TP212
引用信息:
[1]叶子,孙宁,刘伟景.电容式铜掺杂氧化锌湿度传感器的特性[J].微纳电子技术,2019,56(05):368-375.DOI:10.13250/j.cnki.wndz.2019.05.006.
基金信息:
国家自然科学基金资助项目(11404207,61604002,11647023);; 上海自然科学基金资助项目(17ZR1411500)
2019-04-11
2019-04-11