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微机电系统(MEMS)传感器技术正驱动航空电子系统向小型化、智能化与高可靠性方向深刻变革。系统综述了MEMS传感器在航空器中的应用现状、技术原理、挑战及未来趋势。首先梳理了其从辅助参数监测到核心飞控系统集成的技术演进路径；继而详细阐述了加速度计、陀螺仪、压力传感器及惯性测量单元(IMU)等核心器件的工作原理；并重点剖析了其在导航与飞行控制、发动机健康管理、客舱环境控制等关键系统中的具体应用与效能。针对当前应用瓶颈，深入分析了其在测量精度、极端环境适应性及适航认证方面面临的挑战。最后，展望了未来新材料应用、智能化升级、多传感器深度融合及先进封装工艺等主要发展方向，以期为MEMS传感器在航空领域的持续创新与深度应用提供理论参考与实践指引。
Abstract：Micro-electromechanical system(MEMS) sensor technology is driving a profound transformation in avionics systems toward miniaturization, intelligence and high reliability. The application status, technical principles, challenges and future trends of MEMS sensors in aircraft are systematically reviewed. It begins by tracing their technological evolution from auxiliary parameter monitoring to integration within core flight control systems. The operating principles of core devices, such as accelerometers, gyroscopes, pressure sensors and inertial measurement units(IMUs), are elaborated upon. Furthermore, the analysis focuses on their specific applications and effectiveness in key systems, including navigation and flight control, engine health management and cabin environment control. Addressing the current application bottlenecks, the challenges related to measurement accuracy, extreme environment adaptability and airworthiness certification are thoroughly analyzed. Finally, the main development directions in the future, such as the application of new materials, intelligent upgrades, advanced multi-sensor fusion and advanced packaging processes, are prospected, aiming to provide a theoretical reference and practical guidance for the continued innovation and deeper application of MEMS sensors in the aviation field.
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基本信息:
DOI：10.13250/j.cnki.wndz.26020102
中图分类号:TP212;V243
引用信息:
[1]段建瑞.MEMS传感器在航空器中的应用综述[J].微纳电子技术,2026,63(02):47-57.DOI:10.13250/j.cnki.wndz.26020102.
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