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六氟化硫(SF6)是一种广泛应用于电力设备中的绝缘和灭弧介质气体。在SF6设备运行期间，通过监测和检测设备内部的气体，能够及早发现设备的故障和异常。现有的检测技术存在气体选择性差、响应时间过长、检测步骤繁琐等缺点。为解决这些问题，设计了一种电离式气体传感器，采用微机电系统(MEMS)工艺制备，并使用柔性材料制造了微米柱结构。通过仿真分析了两种激励方式下传感器工作时的电子分布和动态变化规律；通过对比实验研究了不同激励方式下传感器对体积分数为0～500×10-6的SO2、H_2S和0～1 000×10-6的CO的响应特性。实验结果表明，脉冲激励下，传感器的性能得到显著提升。该柔性材料电离式传感器体积小、工作电压低，有较高的灵敏度，重复性误差低至2.3%,为检测SF6设备中的特征分解气体提供了一种新的方法，具有一定的实际应用价值。
Abstract：Sulfur hexafluoride(SF6) is an insulating and arc extinguishing medium gas widely used in power equipment. During the operation of the SF6 equipment, faults and abnormalities can be detected at an early stage by monitoring and detecting the gas inside the equipment. The existing detection technology has the disadvantages of poor gas selectivity, long response time, and cumbersome detection steps. To solve these problems, an ionization gas sensor was designed, prepared by micro-electromechanical system(MEMS) process, and incorporated with a micro-column structure made of flexible materials. The electronic distribution and dynamic variation rule of the sensor under the two excitation modes were analyzed by simulation. The response characteristics of the sensors to SO2, H_2S with volume fractions of 0-500×10-6 and CO of 0-1 000×10-6 under different excitation modes were studied by comparative experiments. The experimental results show that the performance of the sensor is significantly improved under pulse excitation. The flexible material ionization sensor developed in this paper has small size, low working voltage, high sensitivity, and a low repeatability of 2.3%, which provides a new method for detecting characteristic decomposition gases in SF6 equipment and has a certain practical application value.
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基本信息:
DOI：10.13250/j.cnki.wndz.25090402
中图分类号:TP212
引用信息:
[1]赵亮,田兵,吕前程,等.柔性材料气体电离式传感器SF_6特征分解产物响应特性[J].微纳电子技术,2025,62(09):74-86.DOI:10.13250/j.cnki.wndz.25090402.
基金信息:
国家重点研发计划(2022YFB3206803); 南方电网数字电网研究院股份有限公司科技项目(210000KC23010005)
2025-09-10
2025-09-10