| 790 | 8 | 135 |
| 下载次数 | 被引频次 | 阅读次数 |
为了解决目前微电子机械系统(MEMS)加速度计在振动测量领域量程小和振动测量精度低等问题，基于绝缘体上硅(SOI)加工工艺，设计并制作了一款梳齿电容式MEMS加速度计。通过提高工作模态频率和干扰模态频差，提升了加速度计振动环境适应性；加速度计量程达到±50g,非线性度0.2%,横向灵敏度0.17%,分辨率优于0.5mg,体积9 mm×9 mm×2.7 mm,功率损耗30 mW。针对随机振动环境对加速度计的输出精度进行了实验验证，结果表明，MEMS加速度计与标准传感器的输出误差为2.69%,能够满足大部分工程应用需求。
Abstract：To solve the problems of insufficient measurement range and low accuracy for the micro-electromechanical system(MEMS) accelerometer in the field of vibration measurement, a comb capacitive MEMS accelerometer was designed and fabricated based on the silicon-on-insulator(SOI) processing technology. By increasing the working mode frequency and the frequency difference of interference mode, the vibration environment adaptability of the accelerometer is improved. The measurement range of the accelerometer reaches ±50g, nonlinearity reaches 0.2%, transverse sensitivity reaches 0.17%, resolution is better than 0.5mg, volume is 9 mm×9 mm×2.7 mm, and power consumption is 30 mW. The output accuracy of the accelerometer was verified by experiments in random vibration environment. The results show that the output error between the MEMS accelerometer and standard sensor is 2.69%, which can meet the requirements of most engineering applications.
[1] 卞玉民，胡英杰，李博，等.MEMS惯性传感器现状与发展趋势 [J].计测技术，2019,39(4):50-56.
[2] KAMADA Y,ISOBE A,OSHIMA T,et al.Capacitive MEMS accelerometer with perforated and electrically separated mass structure for low noise and low power [J].Journal of Microelectromechanical Systems,2019,28(3):1-8.
[3] WANG C,CHEN F,WANG Y,et al.Micromachined acce-lerometers with ■ noise floor:a review [J].Sensors,2020,20(14):4054-1-4054-18.
[4] BABATAIN W,BHATTACHARJEE S,HUSSAIN A M,et al.Acceleration sensors:sensing mechanisms,emerging fabrication strategies,materials,and applications [J].ACS Applied Electronic Materials,2021,3(1):504-531
[5] DAVIS B S,DENISON T,KAUNG J B.A monolithic high-g SOI-MEMS accelerometer for measuring projectile launch and flight accelerations [J].Shock and Vibration,2004,13(2):296-299.
[6] MARUTHI G S,HEGDE V.Application of MEMS accele-rometer for detection and diagnosis of multiple faults in the roller element bearings of three phase induction motor [J].IEEE Sensors Journal,2016,16(1):145-152.
[7] PEDOTTI L,ZAGO R M,FRUETT F.Fault diagnostics in rotary machines through spectral vibration analysis using low-cost MEMS devices [J].IEEE Instrumentation and Measurement Magazine,2017,20(6):39-44.
[8] SPELLER K E,YU D L.A low-noise MEMS accelerometer for unattended ground sensor applications [J].Proceedings of SPIE,2004,5417:63-72.
[9] IWANIEC M,HOLOVATYY A,TESLYUK V,et al.Development of vibration spectrum analyzer using the Raspberry Pi microcomputer and 3-axis digital MEMS accelerometer ADXL345 [C] // Proceedings of the International Conference on Perspective Technologies & Methods in MEMS Design.Lviv,Ukraine,2017:25-29.
[10] WON J,PARK J,PARK J W,et al.BLESeis:low-cost IoT sensor for smart earthquake detection and notification [J].Sensors,2020,20(10):2963-1-2963-10.
[11] PEDOTTI L,ZAGO R M,GIESBRECHT M,et al.Low-cost MEMS accelerometer network for rotating machine vibration diagnostics [J].IEEE Instrumentation and Mea-surement Magazine,2020,23(7):25-33.
[12] 董景新.微惯性仪表—微机械加速度计 [M].北京：清华大学出版社，2003.
[13] 李志宏，张大成，郝一龙，等.SOI MEMS加工工艺研究 [C] // 全国微米/纳米技术学术会议.上海，中国，2000:18-20.
[14] GUPTA N,DUTTA S,PANCHAL A,et al.Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure [J].Journal of Materials Science:Materials in Electronics,2019,30(16):15705-15714.
[15] WANG Y,ZHAO X F,WEN D Z.Fabrication and characteristics of a three-axis accelerometer with double l-shaped beams [J].Sensors,2020,20(6):1780-1-1780-12.
[16] FURUBAYASHI Y,OSHIMA T,YAMAWAKI T,et al.■ capacitive MEMS accelerometer with electrically separated mass structure and digital noise-reduction techniques [J].IEEE Journal of Solid-State Circuits,2020,55(9):2539-2552.
基本信息:
DOI：10.13250/j.cnki.wndz.2023.01.013
中图分类号:TP212
引用信息:
[1]王宁,杨拥军,任臣,等.一种振动测量用电容式硅基MEMS加速度计[J].微纳电子技术,2023,60(01):108-115.DOI:10.13250/j.cnki.wndz.2023.01.013.
2023-01-15
2023-01-15