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首先介绍了昆虫微机电混合系统领域的研究背景与研究动态,概述了昆虫微机电混合系统的原理及主要优势,分析了昆虫微机电混合系统的关键技术。由于昆虫微机电混合系统是生物领域与MEMS领域的交叉融合,所以其最终实现是一个复杂的过程,涉及接口可靠性、运动控制、无线收发、能源供给等一系列难题,详细从以上4个方面讨论了其工作原理与实现过程。最后,就其前景进行了分析,昆虫微机电混合系统对很多应用领域带来重大影响。
Abstract：The research background and status of the hybrid insect micro-electromechanical system(MEMS) are introduced firstly,the principle and main advantages of the hybrid insect MEMS are outlined,and the key technologies of the hybrid insect MEMS are analyzed.Since the hybrid insect MEMS is based on the fusion of the biotechnology and MEMS,its implementation is a complicated process involving the interface reliability,locomotion control,wireless transmission and power generation,and its work principle and realization process are discussed in detail from the above four aspects.Finally,the prospect of the hybrid insect MEMS is analyzed,the hybrid insect MEMS will impact on many application fields significantly.
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基本信息:
中图分类号:TH703
引用信息:
[1]冯清娟,胡开博,朱智源.昆虫微机电混合系统发展现状及其关键技术[J].微纳电子技术,2012,49(05):285-290+301.
2012-05-15
2012-05-15