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硅谐振压力传感器因其数字频率信号输出和高精度的特点，被广泛应用于航空航天、工业控制等领域。硅谐振压力传感器的闭环控制系统决定硅谐振压力传感器的性能指标，系统的稳定性分析和参数优化则是谐振传感器的研究难点。基于系统状态方程从理论上推导了控制策略，提出系统稳定性判定依据。利用Simulink仿真搭建系统模型，并通过电路测试验证。结果表明，在满足稳定性判据的条件下，研制的硅谐振压力传感器基频为42 kHz,品质因数为30 000。在量程范围为3～130 kPa、温度为-55～85℃时，该谐振压力传感器的精度高达0.01%F.S.,实现了恒幅控制与实时频率跟踪。
Abstract：Due to digital frequency signal output and high precision, the silicon resonant pressure sensor is widely used in aerospace, industrial control and other fields. The closed-loop control system of the silicon resonant pressure sensor determines its performance index. The stability analysis and parameter optimization of the system are the research difficulties of resonant sensors. Based on the system state equation, the control strategy was theoretically derived, and the basis for determining the stability of the system was proposed. The system model was built by Simulink simulation and verified by the circuit test. The results show that the natural frequency of the developed silicon resonant pressure sensor is 42 kHz with a quality factor of 30 000. The accuracy of the resonant pressure sensor is up to 0.01%F.S. under the condition of the stability criterion in the measuring range of 3-130 kPa and temperature range of-55-85 ℃. And the oscillation amplitude control and real-time frequency tracking can be achieved.
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基本信息:
DOI：10.13250/j.cnki.wndz.2023.01.010
中图分类号:TP212
引用信息:
[1]胡宗达,周红,张坤,等.高精度MEMS硅谐振压力传感器闭环控制系统[J].微纳电子技术,2023,60(01):87-93.DOI:10.13250/j.cnki.wndz.2023.01.010.
基金信息:
四川省重点科技攻关计划资助项目(2021JHKJ14010OK-083); 航空工业凯天重点预研项目(Y2112)
2023-01-15
2023-01-15