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柔性压阻式压力传感器是可穿戴健康监测系统和人机交互设备的重要组成部分。在实际应用中,对具有高灵敏度和宽线性范围的压阻式压力传感器的需求迫切。以石墨烯油墨为功能层、聚二甲基硅氧烷(PDMS)为柔性材料,设计并制备了具有仿生银杏叶微结构的柔性压力传感器。利用扫描电子显微镜(SEM)表征了传感器的表面形貌。结果表明,仿生银杏叶表面的微结构包括平行叶脉和各种形状不一的凸起。该传感器具有1.56 kPa-1的高灵敏度和22.6 Pa～20 kPa的宽线性范围,当施加不同的载荷时有明显的台阶现象,并且可以在10 000次的循环压力测试下保持稳定良好的性能。传感器的响应时间缩短至80 ms左右。此外,该压阻式压力传感器可用于检测人体关节的运动,表明其在健康监测和电子皮肤中应用潜力巨大。
Abstract：Flexible piezoresistive pressure sensor is an important part of wearable health monitoring systems and human-machine interaction devices.In practical applications,the piezoresistive pressure sensor with high sensitivity and wide linear range is urgently needed.The flexible pressure sensor with the biomimetic ginkgo leaf microstructure was designed and fabricated by using graphene ink as the functional layer and polydimethylsiloxane(PDMS)as the flexible material.The surface morphology of the sensor was characterized by the scanning electron microscopy(SEM).The result shows that the surface microstructure of the biomimetic ginkgo leaf includes parallel veins and bulges with various shapes.The sensor has a high sensitivity of 1.56 kPa-1 and a wide linear range of 22.6 Pa-20 kPa.The step phenomenon is obvious when different pressures are applied.In addition,the sensor can maintain stable and good performance under 10 000 times of cyclic pressure test.The response time of the sensor is as short as about 80 ms.Furthermore,the piezoresistive pressure sensor can be used to detect the movement of human joints,indicating its great application potential in health monitoring and electronic skin.
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基本信息:
DOI：10.13250/j.cnki.wndz.2020.03.005
中图分类号:TP212
引用信息:
[1]李伊梦,侯晓娟,张辽原,等.石墨烯/PDMS仿生银杏叶微结构柔性压阻式压力传感器[J].微纳电子技术,2020,57(03):198-203.DOI:10.13250/j.cnki.wndz.2020.03.005.
基金信息:
国家自然科学基金资助项目（51705476）;; 国家重点研发计划资助项目（2019YFF0301802）