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采用水热法合成了氧化铟(In_2O3)微球结构。利用X射线衍射仪(XRD)和扫描电子显微镜(SEM)表征分析In_2O3样品的晶相、元素种类和微观形貌。测试结果表明:合成的In_2O3为空心的微球结构,且其平均直径约1μm。同时,制备了基于In_2O3的气体传感器,并对异丙醇的气敏特性进行研究。实验结果表明:在最佳工作温度(300℃)条件下,该气体传感器对体积分数为10-4异丙醇气体的响应可达10.3,响应时间和恢复时间分别为2 s和7 s,且最低检测极限为5×10-7。最后,讨论了In_2O3材料对异丙醇的气敏机理。
Abstract：Indium oxide(In_2O3)microsphere structures were synthesized by the hydrothermal method.The X-ray diffraction(XRD)and scanning electron microscope(SEM)were introduced to investigate and analyze the crystal phase,element composition and microtopography of the asprepared In_2O3 samples.The results show that the mean diameter of the synthesized In_2O3 hollow microsphere structures is about 1μm.Meanwhile,the In_2O3-based gas sensor was prepared,and the gas sensing experiments were conducted on the In_2O3 hollow microsphere for isopropanol detection.The measured results exhibit that the response of the gas sensor to isopropanol can reach to 10.3 with the volume fraction of 10-4 under the optimum operating temperature(300 ℃).Moreover,the response time and recovery time are 2 s and 7 s,and the minimal detection limit is as low as 5×10-7.Finally,the gas sensing mechanism of In_2O3 materials to isopropanol was discussed.
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基本信息:
DOI：10.13250/j.cnki.wndz.2016.11.002
中图分类号:TQ133.53;TP212
引用信息:
[1]张萌,孙永娇,位子涵,等.氧化铟微球的制备及其对异丙醇的气敏特性[J].微纳电子技术,2016,53(11):714-718.DOI:10.13250/j.cnki.wndz.2016.11.002.
基金信息:
国家自然科学基金资助项目(51205274);; 山西省人才专项资助项目(2016[36]);; 山西省自然基金资助项目(2016[39]);; 山西省高校科技创新研究项目(2016[37]);; 山西省归国留学择优资助项目([2014]95);; 山西省归国留学基金资助项目(2013-035);; 山西省科技重大专项资助项目(20121101004);; 山西省高等学校特色重点学科建设项目(晋教财[2012]45号)
2016-10-21
2016-10-21
2016-10-21