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柔性传感器是纺织品实现智能化的核心部件,在可穿戴智能设备中发挥着重要的作用。电容式压力传感器具有较高的灵敏度,是柔性压力传感器领域的热点之一。通过分析电容式压力传感器的结构组成,明确了影响电容式压力传感器灵敏度的各种因素。在电容式压力传感器的结构层面上,综述了三类常见的微结构在提升传感器灵敏度方面的应用及各自的优缺点。多孔海绵结构虽然制作过程简单,但是对传感器灵敏度的提升作用并不明显;阵列式结构虽然提升作用明显,但是制作过程复杂;微槽花纹结构制作简单、成本较低、提升作用适中。最后,对高灵敏度电容式压力传感器的应用和发展进行了总结与展望。
Abstract：Flexible sensor is a core component to achieve intelligent textiles and plays an important role in wearable intelligent devices. Capacitive pressure sensor has higher sensitivity and is one of the hot spots in the field of flexible pressure sensors. By an analysis of the structures of the capacitive pressure sensors, the various factors affecting the sensitivity are identified. Based on the structures of the capacitive pressure sensors, applications for increasing the sensitivity, and advantages and disadvantages of three kinds of common microstructures are summarized. The porous sponge structure is simple to process, but has no obvious effect on improving the sensor sensitivity; the array structure has obvious lifting effect, but the process is complex; the micro-groove pattern structure is of simple process and low cost, and has a mo-derate lifting effect. Finally, the application and development of high sensitivity capacitive pressure sensors are summarized and prospected.
[1] TAKAMATSU S,LONJARET T,ISMAILOVA E,et al.Wearable keyboard using conducting polymer electrodes on textiles[J].Advanced Materials,2016,28(22):4485-4488.
[2] KIM K K,HONG S,CHO H M,et al.Highly sensitive and stretchable multidimensional strain sensor with pretrained anisotropic metal nanowire percolation networks[J].Nano Letters,2015,15(8):5240-5247.
[3] CHEN S J,ZHUO B G,GUO X J.Large area one-step facile processing of micro structured elastomeric dielectric film for high sensitivity and durable sensing over wide pressure range[J].ACS Applied Materials & Interfaces,2016,8(31):20364-20370.
[4] TRUNG T Q,DUY L T,RAMASUNDARAM S,et al.Transparent,stretchable,and rapid-response humidity sensor for body-attachable wearable electronics[J].Nano Research,2017,10(6):2021-2033.
[5] CHOI H B,OH J,KIM Y,et al.Transparent pressure sensor with high linearity over a wide pressure range for 3D touch screen applications[J].ACS Applied Materials & Interfaces,2020,12(14):16691-16699.
[6] GERRATT A P,MICHAUD H O,LACOUR S P.Elastomeric electronic skin for prosthetic tactile sensation [J].Advanced functional materials,2015,25(15):2287-2295.
[7] YAN J F,MA Y N,LI X X,et al.Flexible and high-sensitivity piezoresistive sensor based on MXene composite with wrinkle structure[J].Ceramics International,2020,46(15):23592-23598.
[8] RAHMAN A,SYDUZZAMAN M,KHALIDUZZAMAN A,et al.Nondestructive sex-specific monitoring of early embryonic development rate in white layer chicken eggs using visible light transmission[J].British Poultry Science,2020,61(2):209-216.
[9] 曾玮宸，刘茜.基于弹性导电包覆纱的手势识别系统设计[J].棉纺织技术，2021,49(4):21-26.
[10] SIVAGNANAPALANI P,SAHOO B,PANDA P K.A study on strontiumniobate based piezo-resistive materials for high-temperature and high-pressure sensor applications[J].ISSS Journal of Micro and Smart Systems,2019,8(1):25-30.
[11] 任秦博，王景平，杨立，等.用于电阻式柔性应变传感器的导电聚合物复合材料研究进展[J].材料导报，2020(1):80-94.
[12] HOSSEINI E S,MANJAKKAL L,SHAKTHIVEL D,et al.Glycine-chitosan based flexible biodegradable piezoelectric pressuresensor[J].ACS Applied Materials & Interfaces,2020,12(8):9008-9016.
[13] 张锦桐，周刚，陈桂婷，等.电极与介电层褶皱接触对压电式柔性电子皮肤性能的影响[J].复合材料学报，2020,37(12):260-266.
[14] 张旭，覃双，杨舒棋，等.PVDF压电传感器及敏感单元设计关键技术[J].高压物理学报，2020,34(2):43-49.
[15] DINH T H N,MARTINCIC E,DUFOUR-GERGAM E,et al.Capacitive flexible pressure sensor:microfabrication process and experimental characterization[J].Microsystem Technologies,2016,22(3):465-471.
[16] 彭军，李津，李伟，等.柔性可穿戴电子应变传感器的研究现状与应用[J].化工新型材料，2020,568(1):63-68.
[17] VARMA M A,JINDAL S K.Novel design for performance enhancement of a touch-mode capacitive pressure sensor:theoretical modeling and numerical simulation[J].Journal of Computational Electronics,2018,17(3):1324-1333.
[18] WANG X L,XIA Z D,ZHAO C,et al.Microstructured flexible capacitive sensor with high sensitivity based on carbon fiber-filled conductive silicon rubber[J].Sensors and Actuators:A,2020,312:112147-1-112147-33.
[19] 范俊峰.无机纳米材料改性胶粉/橡胶复合材料的性能与机理研究[D].南京：东南大学，2010.
[20] MA L Q,YU X C,YANG Y Y,et al.Highly sensitive flexible capacitive pressure sensor with a broad linear response range and finite element analysis of micro-array electrode[J].Journal of Materiomics,2020,6(2):321-329.
[21] 李雪萍，杨晓锋，卿新林.一种柔性电容传感器的压力传感特性及其机理研究[J].传感技术学报，2019,32(8):1189-1193.
[22] 杜青.基于PDMS复合介电层的电容式柔性压力传感器研究[D].太原：太原理工大学，2018.
[23] 顾志荣.大面积高密度柔性阵列传感器技术研究[D].杭州：杭州电子科技大学，2018.
[24] 汪海船.基于PDMS/CNTs的柔性压力传感器的研究[D].桂林：广西师范大学，2020.
[25] 王俊璞.柔性导电纤维/织物应变传感行为与机理研究[D].西安：西北工业大学，2014.
[26] 郭安琪.黑磷烯电学与力学特性在柔性压力传感器中的应用探索[D].南京：东南大学，2019.
[27] 熊耀旭.柔性压力传感器的制备及灵敏度影响因素探究[D].深圳：中国科学院大学(中国科学院深圳先进技术研究院),2020.
[28] 余晓光.基于廉价碳网络结构的柔性压阻复合材料及其应变传感器[D].重庆：重庆大学，2018.
[29] 张慧.基于银纳米颗粒/碳纳米管的可压缩柔性高灵敏压阻式传感器的研究[D].武汉：华中科技大学，2017.
[30] 畅旭东.纳米银线/聚二甲基硅氧烷电容式柔性传感器的制备与研究[D].天津：天津工业大学，2019.
[31] 陈瞳，王瑞荣，李晓红.基于PDMS海绵介质层的电容式柔性压力传感器[J].传感技术学报，2019,32(4):52-55.
[32] LI W,JIN X,ZHENG Y D,et al.A porous and air gap elastomeric dielectric layer for wearable capacitive pressure sensor with high sensitivity and a wide detection range[J].Journal of Materials Chemistry:C,2020,8(33):11468-11476.
[33] JUNG Y,LEE W J,JUNG K,et al.A highly sensitive and flexible capacitive pressure sensor based on a porous three-dimensional PDMS/microsphere composite[J].Polymers,2020,12(6):1412-1426.
[34] MAHMOUDINEZHAD M H,ANDERSON I,ROSSET S.Interdigitated sensor based on a silicone foam for subtle robotic manipulation[J].Macromolecular Rapid Communications,2020,42(5):202000560-1-202000560-11.
[35] 张鹏，陈昱丞，张建，等.基于双层微结构电极的柔性电容式压力传感器[J].仪表技术与传感器，2020,448(5):15-17.
[36] 沃华蕾.电容式三维力柔性触觉传感器的设计与制备[D].杭州：浙江大学，2019.
[37] 郑娜.基于微结构的柔性压力传感器的设计[D].南昌：江西科技师范大学，2019.
[38] 钟旭燕.压敏型柔性电容传感器介电层的微结构设计[D].大连：大连理工大学，2019.
[39] PALANIAPPAN V,MASIHI S,PANAHI M,et al.Laser-assisted fabrication of a highly sensitive and flexible micro pyramid-structured pressure sensor for e-skin applications[J].IEEE Sensors Journal,2020,20(14):7605-7613.
[40] THOUTI E,NAGARAJU A,CHANDRAN A,et al.Tunable flexible capacitive pressuresensors using arrangement of polydimethylsiloxane micro-pyramids for bio-signal monitoring[J].Sensors and Actuators:A,2020,314:112251-1-112251-31.
[41] YANG J C,KIM J O,OH J,et al.Microstructured porous pyramid-based ultra-high sensitive pressure sensor insensitive to strain and temperature[J].ACS Applied Materials & Interfaces,2019,11(21):19472-19480.
[42] 高孔超，黄尧，吴大鸣，等.基于微纳压印的柔性PDMS薄膜传感器设计[J].仪表技术与传感器，2020(3):6-8.
[43] 张景，马仲，李晟，等.仿生触觉传感器研究进展[J].中国科学：技术科学，2020,50(1):1-16.
[44] 侯玉群.柔性电容式应力传感器及其灵敏度影响因素研究[D].北京：北京印刷学院，2014.
[45] 全勇，魏雄邦，肖伦，等.微纳结构对电容式柔性压力传感器性能影响的研究[J].传感技术学报，2017,30(3):337-340.
[46] 王瑞荣，侯鹏飞，刘继军，等.基于微结构PDMS介质层的电容式柔性阵列压力传感器[J].微纳电子技术，2019,56(5):389-393.
[47] LI T,LUO H,QIN L,et al.Flexible capacitive tactile sensor based on micropatterned dielectric layer [J].Small,2016,12(36):5042-5048.
[48] 肖伦.对电极式柔性压力传感器制备及器件结构优化研究[D].成都：电子科技大学，2017.
[49] PARK S W,DAS P S,CHHETRY A,et al.A flexible capacitive pressure sensor for wearable respiration monitoringsystem[J].IEEE Sensors Journal,2017,17(20):6558-6564.
[50] LU P,WANG L,ZHU P,et al.Iontronic pressure sensor with high sensitivity and linearresponse over a wide pressure range based on soft micropillared electrodes[J].Science Bulletin,2021,66(11):1091-1100.
基本信息:
DOI：10.13250/j.cnki.wndz.2021.12.001
中图分类号:TP212
引用信息:
[1]周帅,刘茜.基于微结构提升柔性电容式压力传感器灵敏度的研究现状[J].微纳电子技术,2021,58(12):1047-1053.DOI:10.13250/j.cnki.wndz.2021.12.001.
2021-09-23
2021-09-23
2021-09-23