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为满足快速测量火工品发火温度的需要，研制了一种以铂铑(PtRh)作为偶极材料的快速响应S型铂铑薄膜热电偶。使用丝网印刷技术，通过光刻制成网版，制备铂-铂铑(Pt-PtRh)偶结点及蛇形微换能元，再经过高温马弗炉烧结工艺完成薄膜热电偶的制备得到样品，最后测试了样品的静态特性和动态特性。实验结果表明，研制的薄膜热电偶的静态性能与标准S型热电偶的热电动势曲线具有较高的吻合度，且薄膜热电偶在低温段(50～600℃)的精度约为1.24%,在高温段(600～1 500℃)约为1.05%。时间常数为530μs。研制的新型铂-铂铑薄膜热电偶具有快速响应、高精度及耐高温等特点，可满足快速测量火工品发火温度的需求。
Abstract：To meet the demand of rapid measurement of ignition temperature of initiating explosive devices, a rapid response S-type platinum rhodium(PtRh) thin film thermocouple was prepared with PtRh as dipole material.The screen plate was prepared by lithography with screen printing technology, and the Pt-PtRh thermocouple electrodes and serpentine micro transducer were prepared.Then the sample was prepared by high-temperature Muffle furnace sintering process to obtain the thin film thermocouple.Finally, the static and dynamic characteristics of the sample were measured.The experimental results show that the static performance of the developed thin film thermocouple is in good agreement with the thermoelectromotive force curve of the standard S-type thermocouple. The accuracy of the thin film thermocouple in the low temperature section(50-600 ℃) is about 1.24%, and that in the high temperature section(600-1 500 ℃) is about 1.05%. The time constant is 530 μs.The new type of Pt-PtRh thin film thermocouple has the features of rapid response, high precision and high temperature resistance, and can satisfy the demand of rapid measurement of ignition temperature for initiating explosive devices.
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基本信息:
DOI：10.13250/j.cnki.wndz.2022.05.013
中图分类号:TH811
引用信息:
[1]张秋宁,张志杰,陈昊泽.一种新型铂铑薄膜热电偶的制备及其性能测试[J].微纳电子技术,2022,59(05):473-479+493.DOI:10.13250/j.cnki.wndz.2022.05.013.
基金信息:
装备预研基金资助项目(61406190504)
2022-01-30
2022-01-30
2022-01-30