| 355 | 13 | 33 |
| 下载次数 | 被引频次 | 阅读次数 |
研究了用于声表面波滤波器的微米尺度的叉指换能器的制作工艺。利用剥离工艺,分别采用铝和铬金两种金属制作了叉指换能器的电极,分析了剥离工艺制作叉指电极时的工艺特性。对加工样品的测量分析结果表明,利用剥离工艺制备的叉指换能器电极线条光滑、陡直、清晰,但是成品率较低。对比分析了采用铝和铬金制作的叉指换能器样品结构,结果表明两种金属材料在剥离液中的腐蚀时间不同,铝材料需要较长的剥离时间;两种材料制作的电极图形质量也有差异,铝材料制作的电极更为陡直、精细。
Abstract：The fabrication process of the interdigital transducer(IDT) in micro scale for surface acoustic wave(SAW) filters was studied.Using the lift-off technology,the IDT electrodes were prepared with two kinds of metal materials including Al and Cr-Au,respectively.The process characteristic of the IDT fabricated by lift-off technology was analyzed.The test results of the processing samples indicate that the electrode lines of the IDT fabricated by the lift-off technology are smooth,steep and distinct,but the finished products rate is low.The sample structures of the IDT using Al and Cr-Au were compared.The results show that the corrosion time of the two kinds of metal materials in the lift-off liquid is different,the Al material need the longer time;the graphics quality of the electrodes fabricated with two kinds of metal materials is different,the electrode fabricated with the Al material is more steep and refined.
[1]LORD R.On waves propagated along the plane surface of an elastic body[C]//Proceedings of the London Mathematical Society.London,England,1885:4-11.
[2]WHITE R M,VOLTMER F W.Direct piezoelectric coupling to surface elastic waves[J].Appl Phys Lett,1965,7(12):314-316.
[3]CHEN Y H,GAO Y,XI S W,et al.Effect of ArO 2 gas ratio and annealing temperature on the structure and properties of ZnO film[C]//Proceedings of the10 th IEEE International Conference on Electronic Measurement and Instruments.Chengdu,China,2011:54-57.
[4]王祥邦,李勇,陈培棣.声表面波器件制作中的干法刻蚀工艺[J].压电与声光,2005,27(6):711-713.
[5]高阳,李以贵,张俊峰.铜叉指换能器声表面波驱动装置的研究[J].微细加工技术,2008(5):21-23.
[6]GEUN-HYOUNG L.Improvement in crystalline quality and sur-face smoothness of ZnO film by multi-step deposition process[J].Applied Surface Science,2011,257(8):3423-3426.
[7]GAO Y,CHEN Y D,XI S W,et al.Development of the 400MHz power durable SAW filter[J].Key Engineering Materials,2011,483:381-386.
[8]ACHENBACH S,KLYMYSHYN D,MAPPES T,et al.Sub-micron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off[J].Microsystem Technologies,2008,14(9/10/11):1715-1719.
[9]IWATA K,KOSHIDO Y,HAGI T,et al.A180nm lift-off process for5GHz band surface acoustic wave filters using an i-line reduction stepper[C]//Proceedings of IEEE Ultraso-nics Symposium.Hawaii,USA,2003:1754-1757.
[10]HATAKEYAMA H,OMORI T,HASHIMOTO K,et al.Fabrication of SAW devices using SEM-based electron beam li-thography and lift-off technique for lab use[C]//Procee-dings of IEEE Ultrasonics Symposium.Palais des Congrés,Montréal,Canada,2004:1896-1990.
基本信息:
中图分类号:TN713;TN305
引用信息:
[1]陈颖慧,高杨,郑英彬,等.剥离工艺制作SAW滤波器IDT的研究[J].微纳电子技术,2012,49(02):124-128.
基金信息:
中国工程物理研究院科技发展基金重点课题(2010A0302013)
2012-02-15
2012-02-15