微纳电子技术

在太阳能电池制造工业中,为解决硅片制绒前的传统表面处理存在的药剂消耗多以及硅片去除量大的问题,引入电化学清洗的方法。这种方法是利用专用试剂电解后的强氧化性质,通过腐蚀、氧化与清洗的结合,有效清洗硅片表面有机物,且硅片去除量小。从实验中可以看出,去除量减少了1/2。通过应用金刚石膜电极,可高效生产专用试剂电解液。通过XPS显示,电化学清洗能够有效去除有机物污染。对比了电化学清洗与RCA清洗后硅片制绒的效果,证明电化学清洗的制绒效果良好。使用后的电解液经过电极处理后,仍能有效重复使用,说明电化学清洗可有力地控制排放,是大型工业生产中有效去除有机物的方法。

An electrochemical cleaning method was introduced in order to decrease large consumption of reagents and silicons during the tradition surface treatment before silicon texturing in solar cell manufacturing industry.Through this method,organic contaminants are effectively removed by using the strong oxidizing properties of electrolyzed special reagents with corrosion,oxidization and cleaning.The experimental results show that the removal amount of silicon is decreased by 1/2 times.The special reagents were produced effectively by using diamond thin film electrodes.The XPS measurement shows that the organic contaminants are effectively removed by the electrochemical cleaning.A comparative experiment of surface treatments with electrochemical and RCA cleaning methods was made.The result shows that the electrochemical cleaning is better.The electrolyte after cleaning treated by electrodes is still effective,which indicates electrochemical cleaning can control the emission effectively.So the electrochemical cleaning method is effective to remove organic contaminants in mass production.